10/11/2010	11:20:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/11/2010	11:20:52 AM	Recipe started at 11:20 AM
10/11/2010	11:20:52 AM	H2 valve closed
10/11/2010	11:20:52 AM	BCl3 valve closed
10/11/2010	11:20:52 AM	PH3 valve closed
10/11/2010	11:20:52 AM	SiCl4 pre valve closed
10/11/2010	11:20:52 AM	SiCl4 post valve closed
10/11/2010	11:20:52 AM	Main Vac valve closed
10/11/2010	11:20:52 AM	Bypass valve closed
10/11/2010	11:20:52 AM	Bubbler valve closed
10/11/2010	11:20:52 AM	Helium valve opened
10/11/2010	11:20:52 AM	Helium MFC set to  500.000000
10/11/2010	11:20:52 AM	H2 MFC set to  0.000000
10/11/2010	11:20:52 AM	BCl3 MFC set to  0.000000
10/11/2010	11:20:52 AM	PHl3 MFC set to  0.000000
10/11/2010	11:20:52 AM	SiCl4 MFC set to  0.000000
10/11/2010	11:20:52 AM	Bypass solenoid MFC set to  0.000000
10/11/2010	11:20:52 AM	Tube furnace set to 0
10/11/2010	11:22:12 AM	Helium valve closed
10/11/2010	11:22:12 AM	H2 valve closed
10/11/2010	11:22:12 AM	BCl3 valve closed
10/11/2010	11:22:12 AM	PH3 valve closed
10/11/2010	11:22:12 AM	SiCl4 pre valve closed
10/11/2010	11:22:12 AM	SiCl4 post valve closed
10/11/2010	11:22:12 AM	Main Vac valve closed
10/11/2010	11:22:12 AM	Bypass valve closed
10/11/2010	11:22:12 AM	Bubbler valve closed
10/11/2010	11:22:12 AM	Helium MFC set to  0.000000
10/11/2010	11:22:12 AM	H2 MFC set to  0.000000
10/11/2010	11:22:12 AM	BCl3 MFC set to  0.000000
10/11/2010	11:22:12 AM	PHl3 MFC set to  0.000000
10/11/2010	11:22:12 AM	SiCl4 MFC set to  0.000000
10/11/2010	11:22:12 AM	Bypass solenoid MFC set to  0.000000
10/11/2010	11:22:13 AM	Tube furnace set to 0
10/11/2010	11:22:13 AM	Run finished at 11:22 AM
10/11/2010	11:22:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/11/2010	6:55:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2010	6:55:44 PM	Recipe started at 6:55 PM
10/11/2010	6:55:44 PM	Helium valve closed
10/11/2010	6:55:44 PM	H2 valve closed
10/11/2010	6:55:44 PM	BCl3 valve closed
10/11/2010	6:55:44 PM	PH3 valve closed
10/11/2010	6:55:44 PM	SiCl4 pre valve closed
10/11/2010	6:55:44 PM	SiCl4 post valve closed
10/11/2010	6:55:44 PM	Main Vac valve closed
10/11/2010	6:55:44 PM	Bubbler valve closed
10/11/2010	6:55:44 PM	Bypass valve opened
10/11/2010	6:55:44 PM	Helium MFC set to  0.000000
10/11/2010	6:55:44 PM	H2 MFC set to  0.000000
10/11/2010	6:55:44 PM	BCl3 MFC set to  0.000000
10/11/2010	6:55:44 PM	PHl3 MFC set to  0.000000
10/11/2010	6:55:44 PM	SiCl4 MFC set to  0.000000
10/11/2010	6:55:44 PM	Bypass solenoid MFC set to  0.000000
10/11/2010	6:55:44 PM	Tube furnace set to 0
10/11/2010	6:56:47 PM	Helium valve closed
10/11/2010	6:56:47 PM	H2 valve closed
10/11/2010	6:56:47 PM	BCl3 valve closed
10/11/2010	6:56:47 PM	PH3 valve closed
10/11/2010	6:56:47 PM	SiCl4 pre valve closed
10/11/2010	6:56:47 PM	SiCl4 post valve closed
10/11/2010	6:56:47 PM	Bubbler valve closed
10/11/2010	6:56:47 PM	Main Vac valve opened
10/11/2010	6:56:47 PM	Bypass valve opened
10/11/2010	6:56:47 PM	Helium MFC set to  0.000000
10/11/2010	6:56:47 PM	H2 MFC set to  0.000000
10/11/2010	6:56:47 PM	BCl3 MFC set to  0.000000
10/11/2010	6:56:47 PM	PHl3 MFC set to  0.000000
10/11/2010	6:56:47 PM	SiCl4 MFC set to  0.000000
10/11/2010	6:56:47 PM	Bypass solenoid MFC set to  0.000000
10/11/2010	6:56:47 PM	Tube furnace set to 0
10/11/2010	6:56:47 PM	Run finished at 6:56 PM
10/11/2010	6:56:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2010	6:57:22 PM	Bypass valve closed
10/11/2010	6:57:23 PM	Main Vac valve closed
10/11/2010	6:57:28 PM	Main Vac valve opened
10/11/2010	6:57:30 PM	Bypass valve opened
10/11/2010	6:58:39 PM	Bypass valve closed
10/11/2010	6:58:39 PM	Main Vac valve closed
10/11/2010	6:58:46 PM	Main Vac valve opened
10/11/2010	6:58:46 PM	Bypass valve opened
10/11/2010	7:06:12 PM	Bypass valve closed
10/11/2010	7:06:12 PM	Main Vac valve closed
10/11/2010	7:06:25 PM	Bypass valve opened
10/11/2010	7:06:25 PM	Main Vac valve opened
